E-7000 - Automatic vacuum evaporation system.

Large throw electron beam evaporation with a rotary carousel.

Various configurations are available to the application and production capacity.

This box-type coater with a number of service ports allows installation of internal mechanisms such as planetary carousel.

51 x 75 mm wafers
24 x 100 mm wafers
9 x 150 mm wafers

Four pocket 10 kW e-beam gun.

4000 l.s^-1 Cryogenic pump

Low damage deposition for compound semiconductor (III-V and II-VI) devices.